http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0493367-A3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0754 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-48 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-48 |
| filingDate | 1986-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1992-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0493367-A3 |
| titleOfInvention | Silicone resist materials containing polysilanes and methods of making the same |
| abstract | A silicone resist material of the present invention contains na polysilane of formula (I) n n as an indispensable structure, nwherein nR₁ to R₃ may be identical or may be different, each representing na hydrogen atom, an alkyl group with 1 to 10 carbon atoms, or a nnonsubstituted or substituted aryl group with 6 to 14 carbon natoms, nR₄ represents an alkylene group with 1 to 10 carbon atoms or a nnonsubstituted or substituted phenylene group with 6 to 14 carbon natoms, nand at least one of substituents R₅ to R₉ is a hydroxyl group, nand the remaining groups other than the hydroxyl group among the ngroups R₅ to R₉ may be identical or may be different, each representing na hydrogen atom, a carboxyl group, or an alkoxy group nwith 1 to 10 carbon atoms, nand n and k represent positive integers and m represents zero or na positive integer. |
| priorityDate | 1985-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.