| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1991-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a14aca620283980c7fff27155cd85c84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_094a8ba853a28be254df4ed598ad3c2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7482e2b09c146de7a60ad7a3c46984ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b072f1f665595973691f9c24f93bca6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a019ad0c9ae31d720d07866badf23e3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b87e931d8956b93cfdce63ecd5b8df47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa68967d6097150d500c7a28c36fdf4d |
| publicationDate |
1997-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0492253-B1 |
| titleOfInvention |
Photolithographic process |
| priorityDate |
1990-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |