| abstract |
In the method of manufacturing a humidity sensor, in particular a capacitive humidity sensor with a polyimide as the moisture-sensitive layer (4), the polyimide (4), dissolved in a polar solvent by being completely imidized, is spread on an insulating substrate, having at least one connection or base electrode (2, 3), after which the solvent is removed. Preferably, for capacitive humidity sensors, a covering electrode (5) allowing moisture to pass through is used. |