| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-213 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-4535
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C20-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-25 |
| filingDate |
1991-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1992-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0479105-A3 |
| titleOfInvention |
Process for forming silica films |
| priorityDate |
1990-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |