| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-239 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1990-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1992-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0478576-A4 |
| titleOfInvention |
Perfluoropolymer coated pellicles |
| abstract |
Pellicles (1) having films (10) bearing at least one coating (11) of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluoro (alkyl vinyl) ether, and further comprising iodo moieties. |
| priorityDate |
1989-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |