| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23a4e0c875bf1ac2b8a3b76517de6c7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aaae00479c8b1b24221e4f3e983dbac |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49103 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
1991-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c04a0f5e0067908144c77808bb00a9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_932a118913e7ca857ed8dce06593a9f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76716f0e900c73726fb3f9391c05850b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e1ac14c8de54e8fda3ae656414605fd |
| publicationDate |
1995-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0474280-B1 |
| titleOfInvention |
Method for forming thin silicon membrane or beam |
| priorityDate |
1990-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |