| abstract |
R¹, R², Wasserstoff- oder Halogenatome oder R³ und R⁴ Alkyl-, Alkoxy-, Carboxyl-, Alkoxycarbonyl- oder Aryloxycarbonylgruppen R⁵, R⁶, R⁹ und R¹⁰ Alkylgruppen R⁷ eine Alkyl- oder Alkoxyalkylgruppe und R⁸ eine Alkylengruppe bedeuten. Das Gemisch ist hochlichtempfindlich und ergibt Photoresistschablonen mit senkrechten Flanken.A photopolymerizable mixture is described which comprises a polymeric binder, a free-radically polymerizable compound with at least one terminal ethylenic double bond and a photoinitiator combination of an N-heterocyclic compound, a thioxanthone derivative of the formula I. and a dialkylamino compound of one of the formulas II or III contains what R¹, R², Hydrogen or halogen atoms or R³ and R⁴ Alkyl, alkoxy, carboxyl, alkoxycarbonyl or aryloxycarbonyl groups R⁵, R⁶, R⁹ and R¹⁰ Alkyl groups R⁷ an alkyl or alkoxyalkyl group and R⁸ an alkylene group mean. The mixture is sensitive to high light and results in photoresist stencils with vertical flanks. |