| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-0114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-4259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-044 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 |
| filingDate |
1991-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2424d18b0ada4a9f754e211c238b2b76 |
| publicationDate |
1992-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0473040-A1 |
| titleOfInvention |
System for delivery of reactive gases from a source of supply to a tool |
| abstract |
Remote delivery system for potentially toxic CVD system). moisture sensitive process gas to a point of use (e.g. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9848215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5727589-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008085474-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7789961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1229990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1229990-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0655578-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0655578-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8133186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9722823-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111189965-A |
| priorityDate |
1990-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |