| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ac17835c97e6c72213815ca74845386 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1991-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_666d98ccc9a1e65d37a93b82466ef54c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaf65f565a0be3eec4bb55ea4cbef5c2 |
| publicationDate |
1997-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0469584-B1 |
| titleOfInvention |
Resist composition |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7323290-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7148265-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7364834-B2 |
| priorityDate |
1990-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |