| abstract |
There is disclosed a method of irradiating low-energy electrons that has the steps of irradiating a primary electron beam from a primary electron beam irradiation portion onto a secondary electron emission portion to emit a secondary electron beam, accelerating the emitted secondary electron beam, removing high-energy components from the accelerated secondary beam, and decelerating the secondary electron beam without the high-energy components into a focus. And there is also disclosed an apparatus for irradiating low-energy electrons that has a primary electron beam irradiating section (101), a secondary electron emitting section (107) which receives the primary electron beam and emits a secondary electron beam, a secondary electron beam accelerating section (109), energy analyzing section (110) which removes high-energy components from the accelerated secondary electron beam, to obtain low-energy secondary electrons, and deceleration section (114, 115) for decelerating the low-energy secondary electrons into a focus. |