http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0465064-A3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1991-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1992-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0465064-A3 |
| titleOfInvention | Resist and process for forming patterns using the same |
| priorityDate | 1990-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.