| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3af3390937c06df72b00e23a42cf63ef |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate |
1991-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_286f274cda71b178ae9a38ccc81ad753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_046195844a82e40462b9f6e609e93155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f8371ae498950495a5d23356cd1cb37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a815c70596e057fabb737f370883076 |
| publicationDate |
1999-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0462391-B1 |
| titleOfInvention |
Acid hardened photoresists |
| priorityDate |
1990-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |