| abstract |
An X-ray analysis apparatus has a charged particle beam generator (1,2), an X-ray generating target (3) bombarded by the beam and a detector (8) for X-rays from said target (3) transmitted by a test piece (6). To improve the spatial resolution of the apparatus, the beam size is reduced at the target by locating the target (3) outside a vacuum chamber of the beam generator (1,2) by providing the target (3) as a non-circular narrow track of X-ray generating material exposed at both surfaces of the target, and by providing the beam generator with a beam accelerator and means (2) for reducing the beam diameter between the beam accelerator and the target (3). |