http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0461654-A2

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
filingDate 1991-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b0528a8ae6ad84bf0d1255548c1110
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcebffb0784b14ea7b6231a99c100075
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04f17fe902497fc83a69f64727904630
publicationDate 1991-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0461654-A2
titleOfInvention Radiation-sensitive positive resist composition
abstract A positive resist composition comprising a radiation-sensitive component, an alkali-soluble resin and a phenol compound of the formula:n n wherein R is a hydrogen atom, a lower alkyl group or a phenyl group, R' is an alkyl group or an alkoxy group, and n is a number of 0 to 3, which has well balanced good properties such as sensitivity, resolution, heat resistance and adhesiveness.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0550893-A1
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priorityDate 1990-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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