| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1990-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3519bddcb801454e438e2a950780a3be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b0528a8ae6ad84bf0d1255548c1110
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcebffb0784b14ea7b6231a99c100075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf857d178744ce5079726f2430eb5ddb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1b5f305526844a5b3e37ca478cb0272 |
| publicationDate |
1996-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0435181-B1 |
| titleOfInvention |
Radiation-sensitive positive resist composition |
| priorityDate |
1989-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |