Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate |
1990-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1996-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d23d16ebb3485e0eff5019ff0eff9af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a09ead351dee53e8ec93ba7d621a72df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72a580e0349b5268a8817981e5717efd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fde28ccab8b33bfc6df4d53db28d95d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e4ce3577dc463e1fd3be6a780a2780c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef65f2a9496ad6fe5f334991dd5840c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4a28d10d54df61c3f225a7a48093b8b |
publicationDate |
1996-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-0388343-B1 |
titleOfInvention |
Chemically amplified photoresist |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8568955-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7374857-B2 |
priorityDate |
1989-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |