| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 |
| filingDate |
1990-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd04ac2b08c4558ad2c7319183a70a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42f3086ecf7e47588bd184e082b72a03 |
| publicationDate |
1990-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0386726-A1 |
| titleOfInvention |
Method for producing single crystal diamond film |
| abstract |
A single crystal diamond film having good electrical characteristics is produced by a method which comprises steps of decomposing a raw material gas comprising a hydrogen gas and a carbon-containing compound and epitaxially growing a single crystal diamond film on a single crystal substrate in a vapor phase, wherein a molar ratio of the carbon atoms in the carbon-containing compound to the hydrogen is from 2:100 to 10:100 and a lattice constant of the single crystal substrate satisfies the following relation: n|(a - a₀)/a| x 100 ≦ 20 (I) nwherein a₀ is the lattice constant of diamond (3.567 Å) and a is a lattice constant of the single crystal substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03052174-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1780315-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0612868-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1780315-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5964942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2400116-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2400116-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5814149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0689233-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03052174-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1321227-C |
| priorityDate |
1989-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |