http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0383972-A1

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filingDate 1989-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_173a78196de9414b2898d3d6c80e9cf5
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publicationDate 1990-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0383972-A1
titleOfInvention Ultrasonic array with trapezoidal vibration elements, and method and device for its manufacture
abstract The array (2) preferably comprises a number of adjacent oscillating elements (4) with a trapezoidal cross section. Incisions (22) separate the individual vibrating elements (4) from one another. They run from the coupling layer (24) via the first electrode (8), the piezo material (6), the second electrode (10) and into the damping body (20). The incisions (22) are preferably made with an excimer laser (42), the laser light (44) of which is focused by means of a focusing device (46) in the form of a cylindrical lens in a line focus (54) on the prepared layer material (40) to be cut . The layer material (40) contains a piezoceramic as piezomaterial (6).
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priorityDate 1989-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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