Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6e55331bee29fd74b0eefb194a54182 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C255-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D455-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C291-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D471-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C291-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D401-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C255-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D455-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D455-04 |
filingDate |
1983-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb0dd18e77cd0cc1314d77bb35f92d8f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f063a093c0c9c745e30ead1e13e0ae4 |
publicationDate |
1990-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-0355934-A2 |
titleOfInvention |
Photobleachable composites |
abstract |
The sharpness of an image produced in a layer of photoresist by imagewise exposure of said layer from a light source emitting light of a predetermined wavelength is improved by the use of a photobleachable composition having an extinction coefficient to molecular weight ratio in liters per gram-centimeter in an unbleached state of greater than 10, and a ratio of extinction coefficient for the unbleached state to extinction coefficient for the bleached state greater than 10. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0462763-A1 |
priorityDate |
1982-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |