| abstract |
The aim is to use photocuring to produce thin, silicone-based layers with high purity, thermal resistance and good dielectric properties with short irradiation times.n n n For this purpose, non-functionalized organosiloxanes with alkyl groups or alkyl and aryl groups are polymerized and / or crosslinked photochemically by means of pulsed laser radiation with a wavelength <400 nm, the pulse duration being 10 ps to 1 ms, the pulse frequency 1 Hz to 10 kHz and the energy density at least 1 J / cm² and the radiation is carried out with one or more pulses.n n n Passivation and insulation layers for semiconductor components and circuits |