| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P80-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 |
| filingDate |
1988-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11ee0d2372251a455e1181c0aba2c7a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_472d111c52db0e544fa48f82e7f1ba1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2302bbc8adbe9173b918a43925f392d9 |
| publicationDate |
1990-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0350531-A2 |
| titleOfInvention |
Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
| abstract |
A dopant film (21) contains an organic binder, an inorganic binder and a compound of an impurity element for diffusion. Both surfaces of the dopant film are coated with adhesive (22). Releasable sheets (23) sandwich the dopant film. The dopant film permits automated alternate stacking with semiconductor wafers, providing an advantage of labor saving. When the alternate stacking is automated, it will become hard for the wafer breakage to occur, sharply decreasing the rate of breakage. Furthermore, since the adhesion of a semiconductor wafer improves, the variation in the diffusion depth will decrease. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0773310-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5759909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6114245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9909588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19538612-A1 |
| priorityDate |
1988-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |