| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99505f5f312672820e9f78c254c00a4d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-02 |
| filingDate |
1989-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_561b223c823b03467321518dab3c1c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9a64330994a472706f6c0497953dbc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_691859c050e31af25dbce7356b7992d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_006eb5bfcc70ef540c323dcdc0ddf260 |
| publicationDate |
1994-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0350363-B1 |
| titleOfInvention |
Process and appliance for determining the impedance of a discharge in a plasma reacteur |
| priorityDate |
1988-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |