http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0342648-A3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 |
| filingDate | 1989-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1991-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0342648-A3 |
| titleOfInvention | Alkali-soluble organopolysiloxane |
| abstract | Alkali-soluble organopolysiloxanes useful in nthe alkali-developing resist materials for use in nmicroprocesses in LSI device fabrication have the nfollowing general formula n nwhere A is a hydroxyphenyl group; R is an alkylene group nhaving 1 to 4 carbon atoms; n is zero or one; R¹ is an nalkyl group having 1 to 4 carbon atoms; x and z are npositive numbers; y is zero or a positive number; x , y , nand z have values such that their ratios are 0.3 ≦ ( x + n y )/ z ≦ 4; and zero ≦ y / x ≦ 5. |
| priorityDate | 1988-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.