| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0345001e918f6aed4484e790b33ddcb6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
1989-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b244bbb951cf9702ef56631350182d89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b938321c1f241b5291af1941bd09b0 |
| publicationDate |
1989-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0342648-A2 |
| titleOfInvention |
Alkali-soluble organopolysiloxane |
| abstract |
Alkali-soluble organopolysiloxanes useful in the alkali-developing resist materials for use in microprocesses in LSI device fabrication have the following general formulan where A is a hydroxyphenyl group: R is an alkylene group having 1 to 4 carbon atoms; n is zero or one; R 1 is an alkyl group having 1 to 4 carbon atoms; x and z are positive numbers; y is zero or a positive number; x, y, and z have values such that their ratios are 0.3 ≦ (x + y)/z ≦ 4; and zero ≦ y/x 5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1650250-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5817302-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5684112-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8329815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1650250-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7811637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0396122-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0396122-A2 |
| priorityDate |
1988-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |