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filingDate 1989-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1993-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0334433-B1
titleOfInvention Planetary reactor for epitaxy
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Total number of triples: 23.