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filingDate 1989-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1989-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0327121-A2
titleOfInvention Superconducting field effect transistor
abstract A superconducting field effect transistor which is very small in size and high in dimensional accuracy, and a method of fabricating this transistor are disclosed. According to the above transistor and method, the fine structure of a gate electrode (3) part can be fabricated easily and accurately.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5521862-A
priorityDate 1988-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 27.