| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b8b744d430e252fa21c14c2b8dee176 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-97 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28512 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1988-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e47b2bfd43665ad7eb9964a775fc91ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c9cfc8d262ec5c246d129a906701a5a |
| publicationDate |
1989-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0325808-A1 |
| titleOfInvention |
Process for producing an electric connexion on a silicon semiconductor device |
| abstract |
After having created contact islands (20) comprising at least one layer of silicide (201) of titanium or cobalt, these islands are covered with a complementary metallic layer (30) obtained by selective growth of tungsten or molybdenum, which is located at said islets. This complementary metal layer serves in particular as a stop layer during the stripping of contact openings (33) in an insulating layer (32) supporting the rest of the interconnection structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0417522-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0491433-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0417522-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0491433-A2 |
| priorityDate |
1987-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |