| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0345001e918f6aed4484e790b33ddcb6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
1988-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f87cd7342b7e33456424b8b9a21af6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd0048f5e6c75e37f49d220a4d7576da |
| publicationDate |
1995-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0315954-B1 |
| titleOfInvention |
Pattern-forming material and pattern formation method |
| priorityDate |
1987-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |