| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d935a2fd3e16d8e76f1d76a30aec0a3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-974 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1988-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a3927c7a52e777ea6156c812e66b8d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0aa6b7e8e9c874685c5781732e770c97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9d234206d1165a58792a187b59fb5ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9a386b8a2490c14a038c13227b05f40 |
| publicationDate |
1989-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0315170-A1 |
| titleOfInvention |
Process for manufacturing silicon wafers |
| abstract |
Silicon wafers and processes for their production are specified which have an intrinsic getter effect and on which thin oxide layers with high dielectric strength can be produced. According to the invention, the panes are subjected to a treatment which smoothes the pane surface during manufacture after the intrinsic getters have been produced, for example polished again. Subsequently applied oxide layers are characterized by an increased dielectric strength compared to untreated panes. |
| priorityDate |
1987-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |