| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate |
1988-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16d47992943030b5652a2f11503eb6aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2e6d5657840e04388c393f06bb4d22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5ac59950fe9aedf4c542d770a2aaf09 |
| publicationDate |
1989-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0297845-A2 |
| titleOfInvention |
Plasma assisted apparatus and method of diamond synthesis |
| abstract |
The present invention includes an apparatus and method for depositing diamond on a substrate. A hydrocarbon/hydrogen gas mixture is passed through a refractory metal hollow cathode which is self heated to a high temperature. The gas mixture is dissociated by a combination of thermal and plasma effects. The plasma plume emanating from the hollow cathode heats the substrate which is positioned on a surface of the anode. Growth of the diamond film is enhanced by bombardment of electrons. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9506143-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0379994-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2287473-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9217619-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-500171-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5075096-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9504350-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0549186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9313242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0561511-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0561511-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5306348-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-412653-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0339992-B1 |
| priorityDate |
1987-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |