| abstract |
In a method of cleaning an exhaust gas comprising a base gas containing toxic arsine, phosphine, diborane and/or hydrogen selenide, the exhaust gas is contacted with a molded cleaning agent consisting of (1) cupric oxide, (2) manganese dioxide, and (3) at least one metal oxide selected from silicon oxide, aluminum oxide and zinc oxide and having a density of from 0.6 to 1.5 g/ml, said composition having a metal atomic ratio M/(M+Cu+Mn) in the range of 0.02 to 0.70 and a metal atomic ratio Cu/(Cu+Mn) in the range of 0.1 to 0.9, wherein Cu, Mn and M represent respectively a number of gram atoms of copper, of manganese, and total of silicon, aluminium and/or zinc. The cleaning agent is used as pellets or particles usually in a fixed bed, in a layer (5) in a column (3), preferably with a layer (6) of a color-changing toxic component detecting agent. The method is effective in removing toxic components in the manufacture of semi-conductors, even at temperatures below 10 DEG C. |