| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-1291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12903
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12854 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1987-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1993-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0273392-B1 |
| titleOfInvention |
Multi-layer structure and method of fabrication thereof |
| priorityDate |
1987-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |