| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-1857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
1987-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7195ff7483edfbfc57b3d33171b7ab90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c630784fe80bf1d50e1143ab3f072e74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eab15d07767dc6c186b5c398d6eb67e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b99dfcd4f5988145d278403c0767fa84 |
| publicationDate |
1993-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0271002-B1 |
| titleOfInvention |
Transmittance modulation photomask, process for producing the same and process for producing diffraction grating |
| priorityDate |
1986-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |