| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
1987-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9183b446c334d5f9dc712987625b19d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f86db98d10ff8f8a0057711c93cfa98b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a09ead351dee53e8ec93ba7d621a72df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6941a58ed63f75592bcdf9eeb26497f |
| publicationDate |
1996-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0264908-B1 |
| titleOfInvention |
High sensitivity resists having autodecomposition temperatures greater than about 160 C |
| priorityDate |
1986-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |