http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0261195-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df0d6684067f3028fa0c90119c7f27b8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80 |
| filingDate | 1987-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f652520d2be5b037bf5356bf8b2dd3e |
| publicationDate | 1988-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0261195-A1 |
| titleOfInvention | An etch technique for metal mask definition |
| abstract | One technique (Figure 3) for forming high definition masks is to form a selectively non-corrodible masking layer (1) using an electron resistant resist (7) and an electron lithographic technique and to employ this layer for the selective pickling of a metallic coating (3). Another selective stripper is then used to remove the masking material (1). The metallic coating (3) is generally made of chromium and can be selectively pickled using a chlorine / oxygen plasma. The masking material (1) can be silicon dioxide and can be etched using a fluorocarbon containing hydrogen (for example CF4 / H2; CHF3). The masking material may optionally be made of aluminum and may be etched using chlorine, boron trichloride or carbon tetrachloride plasma. Other masking materials can be used, such as titanium, silicon, germanium or nickel. The masking layer can be formed using an electron resistant resist above the layer material (Figures 1 to 3). The masking material and the electron-resistant resist can optionally be applied in reverse order and a flotation separation process can be used (Figure 6). |
| priorityDate | 1986-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.