| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-34 |
| filingDate |
1987-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826508e2566d121dfd87f50b2b4c7f8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d9406f4649560bd03f9b3071b5a395f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b9c7a00d7adacd09b8b7d2c5a7c41d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc5e345d2c6cb9b98f0f2b7b7569ab03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3abfe39a62fc2aeba52510579757c246 |
| publicationDate |
1988-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0255037-A2 |
| titleOfInvention |
A method for forming polyimide film by chemical vapor deposition |
| abstract |
A method for forming a polyimide film on a substrate surface by chemical vapor deposition comprises evaporating an aromatic monomer compound having one amino group and two adjacent carboxyl groups or its derivative group, such as esters of 4-amino phthalic acid, and 4-(p-anilino) phthalic acid, thus a high strength polyimide is obtained represented by the general formula having its imide groups being unidirectionally arranged in its backbone chain:n wherein R is nil or divalent aliphatic or aromatic group and n is an integer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019038154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0376333-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0376333-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3183725-A4 |
| priorityDate |
1986-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |