| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba54aff29064e18f1e36be0d4d17be67 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 |
| filingDate |
1987-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bac835d06e2025b9fd4faaf130bdfd7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e77d867ebc16f09d85f3a588e4cc5b41 |
| publicationDate |
1988-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0251555-A1 |
| titleOfInvention |
Gallium Hydride/trialkylamine adducts, and their use in deposition of III-V compound films |
| abstract |
Adduct of the formula nH₃GaNR₃ nwherein each R is independently selected from lower alkyl groups having at least 2 carbon atoms, and a process for depositing gallium nitride, gallium arsenide, or gallium phosphide films, using the above adduct as a source of nitride (for the nitride film) and gallium. Arsenic and phosphorus compounds can also be added for deposition gallium compounds of those elements. The process can also be performed using the analogous trimethylamine adduct. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2221924-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9010727-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2221924-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9307312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9109995-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9109995-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5209952-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5234716-A |
| priorityDate |
1986-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |