| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23ba9f1b163682046ffe20a168fee68e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1987-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9b5f778f9c43abb52d468be6dd10013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e3059876cd4eb0c092e93a34f56b7c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109893df3a0b8a006063cd41f4559dfc |
| publicationDate |
1998-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0249139-B2 |
| titleOfInvention |
Resist compositions and use |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11675267-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021311392-A1 |
| priorityDate |
1986-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |