http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0246169-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_116c53e42911943d95e0f90bcfae8f5b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-118 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 1987-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08cc9571148bc81a6871f896d3c395c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7862357e907ef3706a5d03db0ec6a3c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4c97e728e24545565ca93c0e9022ac2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1291c366a3d3293b0a5fb4c825fa442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebfc4e5cd0b88c50ee1b2a42caed17d5 |
| publicationDate | 1987-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0246169-A1 |
| titleOfInvention | Use of a cross-linkable polysiloxane composition as a negative resist in microlithography, and process for applying it |
| abstract | 1) au moins un organopolysiloxane contenant par molécule au moins x groupes hydrocarbonés à insaturation alcényle liés à un atome de silicium, avec x supérieur ou égal à 2, 2) au moins un organohydrogénopolysiloxane contenant par molécule au moins y atomes d'hydrogène liés à un atome de silicium avec y supérieur ou égal à 2, n(x + y) étant supérieur ou égal à 5, les groupements SiH et Si-alcényle pouvant être portés par la même molécule, 3) une quantité catalytiquement efficace d'un composé d'un métal du groupe du platine, 4) une quantité d'au moins un azodicarboxylate efficace pour inhiber la formation d'un gel à température ambiante mais en quantité insuffisante pour empêcher la réticulation lors de l'insolation au rayons ultra-vilolets, et 5) le cas échéant, un solvant organique. L'invention concerne également un substrat revêtu d'un film formé à partir d'une telle composition et un procédé d'imageage d'un tel substrat. The present invention relates to the use as negative photoresist of a film-forming and crosslinkable organopolysiloxane composition by hydrosilylation reaction in the presence of a catalyst derived from a platinum group metal, the activity of the catalyst being reversibly blocked by an inhibitor, the release of catalytic activity being essentially achievable by exposure to ultraviolet light essentially comprising: 1) at least one organopolysiloxane containing per molecule at least x alkenyl-unsaturated hydrocarbon groups linked to a silicon atom, with x greater than or equal to 2, 2) at least one organohydrogenpolysiloxane containing per molecule at least y hydrogen atoms linked to a silicon atom with y greater than or equal to 2, (x + y) being greater than or equal to 5, the SiH and Si-alkenyl groups being able to be carried by the same molecule, 3) a catalytically effective amount of a compound of a platinum group metal, 4) an amount of at least one azodicarboxylate effective for inhibiting the formation of a gel at room temperature but in an amount insufficient to prevent crosslinking during exposure to ultraviolet rays, and 5) if necessary, an organic solvent. The invention also relates to a substrate coated with a film formed from such a composition and to a method for imaging such a substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0360274-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0360274-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101581880-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5290899-A |
| priorityDate | 1986-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.