http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0244572-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
filingDate | 1987-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1990-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1990-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-0244572-B1 |
titleOfInvention | Capped two-layer resist process |
priorityDate | 1986-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.