http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0241991-A2

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
filingDate 1987-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_646ea8f7250b4bf8b155f4a752cbce6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79efc9858b867d4605405683e01fabc6
publicationDate 1987-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0241991-A2
titleOfInvention Field effect transistor having a membrane overlying the gate insulator
abstract A field effect transistor is provided that includes a membrane overlying its gate insulator. The field effect transistor has separated semiconductor drain and source regions of a polarity opposite to that of the substrate. An electrically insulating layer overlies the gate region between the source and drain region to thereby function as a gate insulator. A membrane overlies the electrically insulating layer, and an electrical contact electrically connects the field effect transistor in a circuit.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7662341-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1085320-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5138251-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6521109-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004036203-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0471269-A1
priorityDate 1986-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 32.