| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e08fd85d97265d6c31ab40f372843d81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C10J3-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02277 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 |
| filingDate |
1986-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e3e8968dc43330c9cb4258abce59bc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dbd3c6140155ab5ec888018730cde5b |
| publicationDate |
1987-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0231262-A1 |
| titleOfInvention |
METHOD FOR PHOTOCHEMICALLY EVAPORATING OXIDE LAYERS. |
| abstract |
Improved method for depositing an oxide layer on a substrate by exposing said substrate to a selected vapor phase reactive agent and an oxygen-containing precursor comprising nitrogen oxide mixed with molecular oxygen in a proportion predetermined, in the presence of radiation of a selected wavelength. The radiation causes the direct precursor comprising oxygen to dissociate directly to form neutral oxygen atoms which react with the reactive agent in the vapor phase and form the oxide which is deposited in layers on the substrate. The reaction rate to form and deposit the oxide layer is improved by mixing molecular oxygen with nitrogen oxide in the precursor. |
| priorityDate |
1985-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |