| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_df0d6684067f3028fa0c90119c7f27b8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
1986-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a34308fd43735202172ebd22c0fab1b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d044947fa8fab23e25f8ba503bbd1f61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7821f35ab6249334c267835b9d4316ec |
| publicationDate |
1987-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0224582-A1 |
| titleOfInvention |
Calibration apparatus for integrated circuits |
| abstract |
Apparatus for calibrating an integrated circuit analysis system comprising a substrate having an essentially planar set of thin film components (1-9) formed thereon. The components are provided with contact pads each comprising a spacing which allows the end of a coplanar waveguide probe of the analysis system to engage in said components. The apparatus corrects errors under the control of a computer, providing measurements of scattering parameters to be performed with reference planes located at the ends of the probe, thereby avoiding the need for sophisticated techniques. error-prone extraction. |
| priorityDate |
1985-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |