http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0216919-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14c9ad767fb6d5e9dabfb770d4e82252 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 1986-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c66ae78bde17f4b39add5e98b0f71420 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_315254a7a6b4509e6269899c36b7766e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f691307dcd398c4d75bad4d14a2a146e |
| publicationDate | 1987-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0216919-A1 |
| titleOfInvention | METHOD AND TARGET FOR DEPOSITING THIN FILM BY SPRAYING. |
| abstract | A sputtering target (176) includes a sputtering surface having first and second areas (208, 206) of first and second respective materials. The first area (208) includes a surface of a first member (208) made of the first material, such as a circular cobalt plate. The second area (206) includes a surface of a second member (206) made of the second material, such as a platinum ring. A cobalt cover ring (210) clamps the platinum ring (206) on the cobalt plate. By modifying the relative size of the first and second zones (208, 206), for example by modifying the dimensions of the cover ring (210) so as to more or less expose the platinum ring (206), the concentration of the two materials in a layer deposited from the target (176) on substrates (260) varies. In addition, by imparting a planetary movement to the substrates (260) during the deposition process, and adjusting the dimensions and position of the exposed portion of the platinum ring (206), a gradient of radial coercivity in the layer is established. deposited on the substrates (260). |
| priorityDate | 1985-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.