http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0213438-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1986-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd61fdb936283bc625d07145cafd9767 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d75ad05655a9e491a9c287c37e20fede |
| publicationDate | 1987-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0213438-A2 |
| titleOfInvention | Method and arrangement for operating a scanning microscope |
| abstract | In a scanning microscope, in which areas of the surface of a sample (PR) to be examined for its electrical or physical properties are scanned point by point with a radiation or particle probe (PB), the scanning speed is derived as a function of a point on the sample surface that is acted upon secondary electrical signal controlled (PA). The output signal of an arrangement for signal processing (SPU), which is evaluated in a window discriminator or comparator (CMP), is used as the control signal and is fed to the VCO (Voltage Controlled Oscillator) of the raster generator (G) via an adjustable timing element. At the same time, the evaluated output signal can be used to modulate the intensity of the write beam of a display device and to control the intensity of the radiation or particle probe (M). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0300571-A1 |
| priorityDate | 1985-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.