| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-26 |
| filingDate |
1986-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5db8c98a9b1c0171bbdef63bbd608dd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cc4fbdc2ec5e90266c13de9fadeaff5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_731b84614e7c5011782bd5eecfb3c51d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9843d44e7429a629697f05706c2ff55 |
| publicationDate |
1987-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0209670-A2 |
| titleOfInvention |
A process for planarizing a substrate |
| abstract |
A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220°C, and curing the coating. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6074757-A |
| priorityDate |
1985-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |