| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3492a7406879265b1f567f37d98dbbaf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21C21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate |
1986-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32cfd51415c494cd03372b79bb397cff |
| publicationDate |
1994-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0207801-B1 |
| titleOfInvention |
Cathode/ground shield arrangement in a target for a sputter coating apparatus |
| priorityDate |
1985-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |