| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_52cd00892a548e92d179344efa0bd3bd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
1986-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13e39b217b12bd49e3d5520e4a4923f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9b427b78efc40b2e199e1bc9c317e9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f94eea736d095c34a846ff54c65233a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_548dabd9a1fa8d346c5ad52c7c78632d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bcd6b5f113994c1aefc84030953b1c4 |
| publicationDate |
1995-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0201380-B1 |
| titleOfInvention |
Low temperature plasma nitridation process and applications of nitride films formed thereby |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8080442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8318538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7705466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8035233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8933570-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8587102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7763948-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9401183-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8824159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8269327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8907499-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7820469-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8841778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8629542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8928119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7911012-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8410617-B2 |
| priorityDate |
1985-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |