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publicationDate 1986-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0179403-A2
titleOfInvention Apparatus for producing thin-film photoelectric transducer
abstract An apparatus and method for producing a thin-film photoelectric transducer. The transducer has a transparent substrate, an amorphous silicon layer and a metal layer; the apparatus has a processing laser for patterning each of the layers. In addition, a separate visible laser is used to detect defects in the layers and the processor laser is then used to correct the defects.
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