| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate |
1985-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1989-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1989-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0177115-B1 |
| titleOfInvention |
Dual ion beam deposition of amorphous semiconductor films |
| priorityDate |
1984-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |